ULVAC UDP-6 6 cfm 6 Torr 2-Stage Oil-Free Diaphragm Pump

ULVAC UDP-6 6 cfm 6 Torr 2-Stage Oil-Free Diaphragm Pump
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  • Item #: UDP-6
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Price $3,990.00

Compact, lightweight, manufactured and imported directly from Japan, ULVAC UDP-6 series dual-stage diaphragm pumps creates deep vacuum by reciprocate movement of rubber diaphragms. These pumps are oil-free, which means less maintenance and no more frequent and costly oil change, or cross contamination.


  • Moisture & solvent evaporation
  • Vacuum chucks, wafer and tip handling devices
  • Vacuum tweezers, medical appliances
  • Printing equipment
  • Automatic packing machines
  • Optical appliances
  • Semiconductor industry



 Model  ULVAC UDP-6
 Electrical requirements
 110V 50/60Hz or 220V 50/60Hz single phase
 Pumping rate
 6 cfm
 Ultimate vacuum level
 6 torr
 KF25 flange
 Adjustable vac./gas ballast  No
 Unit/shipping dimensions (LxWxH)
 8 x 16 x 11" / 18/11/14.5"
 Noise level  110 dB(A) at atmosphere
 Unit/shipping weight
 58 Lb / 63 Lb
 Working environment  32°F to 104°F (0°C to 40°C)



History of ULVAC



Standard package


 Part description


Part image

 ULVAC UDP-6 6 cfm oil-free diaphragm pump
1 pc

 KF25 wing nut flange quick clamp
1 pc

 KF25 flange centering ring
 1 pc

 110V stardard 3-prong US power cord
1 pc
 User's manual in a CD
1 pc


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