Ai 500 Watts 13MHz RF Generator for Up To 150mm Tube Furnaces

Ai 500 Watts 13MHz RF Generator for Up To 150mm Tube Furnaces
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  • Item #: RF500
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Price $12,000.00

Ai RF500 series RF generators give you 500 watts of power and 13.56MHz frequency, they can accommodate up to 150mm OD tubes for you DIY PECVD (Plasma Enhanced Chemical Vapor Deposition) systems for plasma etching, plasma cleaning and plasma polymerization.


 

 

Specifications

 Electrical requirements  208-240 volts 50/60 Hz
 Output power  5 to 500 watts, adjustable in +/-1% step
 RF frequency
 13 MHz with +/-0.005% stability
 Reflection power
 200 watts max.
 Matching  Automatic
 RF output port
 50 Ω, N-type, female
 Cooling  Air


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